Clean Fan Filter Unit

• Supplies clean air through a HEPA filter

Clean air is supplied from the fan filter unit installed inside the HEPA filter.

‍

Comprehensive functions to maintain cleanliness levels

• Equipped with a new air velocity sensor that uses a heated wire resistor

Helps prevent a decrease in ventilation frequency. A newly developed air velocity sensor, using a heated wire resistor, is installed. This sensor can detect a drop in airflow caused by filter clogging, preventing the ventilation frequency from decreasing due to the reduced airflow.

• Filter Clogging Analysis Function

Prevents a drop in airflow caused by filter clogging. When the airflow decreases due to a clogged filter, the system automatically triggers a warning and can also send an alert to external devices. In addition, a variable trimmer for setting the airflow threshold level is installed as a standard feature in the unit.

• Adjustable Airflow Control Function (05FFU)

It can increase airflow when the air velocity decreases. The airflow of the exhaust fan motor installed inside the fan filter unit can be adjusted by changing the voltage level. Users can finely adjust the airflow or increase the air volume when airflow decreases due to pressure loss.

‍

Convenient and highly efficient filter maintenance

• Top-access quick maintenance model with one-touch latch system (01FFU – 05FFU)

Filters can be easily replaced without tools. The one-touch latch system allows the HEPA filter to be removed and replaced conveniently and quickly, without the need for any tools.

• Side air intake (A11FFU–A17FFU)

Minimizes the distance from the ceiling by drawing air from the sides of the fan filter unit, effectively reducing the gap between the unit and the ceiling. This is ideal for installations with low ceilings or in cases where the cleanroom has large height and dimensional requirements.

• Bottom-maintenance model (A11FFU–A17FFU)

Avoid high-altitude maintenance – the HEPA filter can be replaced from inside the booth, eliminating the need to work at height.

• Can easily create a clean environment.

And it can control temperature and humidity when used with a precision air conditioner (TCU/ECU).

A clean environment can be easily created by using it together with a precision air conditioner (TCU/ECU) and a fan filter unit. Precision air produced by the PAU unit is passed through a HEPA filter to deliver purified air to a specific area with a high level of cleanliness. In addition, it can easily control 'temperature and humidity' and create the 'most suitable clean environment' simply by selecting a clean unit that matches the volume of the target area and the required cleanliness level.

‍

Types of Filters

High-Efficiency Filter

• Cleanroom class: Class 10–200,000
• Example applications: General offices, etc.
• Capacity: Has a higher filtration capability than coarse dust filters

HEPA Filter

• Cleanroom class: Class 100–10,000
• Example applications: Post-IC manufacturing processes, liquid crystal processes, etc.
• Capacity: Can capture particles of 0.3 microns up to 99.97%

ULPA Filter

• Cleanroom class: Class 1–10
• Example applications: Pre-IC manufacturing processes, etc.
• Capacity: Can capture particles of 0.1 microns up to 99.99%

‍

‍

Cleanroom Standards

Class 100

• Air change frequency: 250–400 times/hour
• Particle count: 3,530 particles/m³ | 100 particles/ft³
• Air velocity: 0.2–0.4 m/s

Class 1,000

• Air change frequency: 150 times/hour
• Particle count: 35,300 particles/m³ | 1,000 particles/ft³
• Air velocity: 0.1–0.2 m/s

Class 10,000

• Air change frequency: 75 times/hour
• Particle count: 353,000 particles/m³ | 10,000 particles/ft³
• Air velocity: 0.05–0.07 m/s

Class 100,000

• Air change frequency: 20 times/hour
• Particle count: 3,530,000 particles/m³ | 100,000 particles/ft³
• Air velocity: 0.04–0.05 m/s

‍

Clean Fan Filter Units

PAU-01FFU

• Airflow (m³/min): Approx. 0.8 / 0.9 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-03FFU

• Airflow (m³/min): Approx. 2.8 / 3.0 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-05FFU

• Airflow (m³/min): Approx. 4.8 / 5.0 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-A11FFU

• Airflow (m³/min): Approx. 11 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-A14FFU

• Airflow (m³/min): Approx. 14 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-A17FFU

• Airflow (m³/min): Approx. 17 or more
• Dust filtration efficiency: 99.97% or higher for 0.3 μm particles

PAU-A11FFU-ULPA

• Airflow (m³/min): Approx. 9 or more
• Dust filtration efficiency: 99.999% or higher for 0.1 μm particles

PAU-A14FFU-ULPA

• Airflow (m³/min): Approx. 12 or more
• Dust filtration efficiency: 99.999% or higher for 0.1 μm particles

PAU-A17FFU-ULPA

• Airflow (m³/min): Approx. 14 or more
• Dust filtration efficiency: 99.999% or higher for 0.1 μm particles