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HPF-D040
Features and Benefits
- Sealed, Chemically Resistant Materials - 13mm circular sensor pancake lays on bottom of semiconductor wet process tool and detects liquid leak or spill by refraction light principle
- Inherently Safe - Optical light is used from a remotely mounted fiberoptic amplifier
- Sealed, chemically resistant materials - PFA housing and bracket with 316SS mounting gromme
- Quick Detection minimizing environmental impact and messy cleanup - typically, 1ml of liquid contact with the optical focal point will trigger the signal change. Sensitivity is adjustable to some extent by the amplifier used
- Fail Safe Design - Sensing light is conducted from amplifier emitter, reflected off pan, then returned to amplifier receiver. When liquid is present or cable breaks, amplifier changes state
- Floating Head Detection Capability - If the sensing head becomes unattached from the pan, the amplifier will change state. There is no reflective surface included in the head design
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